Pii: S0040-6090(99)00516-7
نویسنده
چکیده
Diamond-like carbon (DLC) ®lms, amorphous hydrogenated or nonhydrogenated forms of carbon, are metastable amorphous materials characterized by a range of attractive mechanical, chemical, tribological, as well as optical and electrical properties. The ®lms can be prepared at low temperatures, from a large variety of precursors, by a diversity of techniques, and their characteristics can be modi®ed by incorporation of different elements such as N, F, Si, or metals. The diversity of methods used for the deposition of DLC ®lms provides the ̄exibility to tailor their properties according to speci®c needs and potential applications. The optical gap of these materials is in the range of 1±4 eV and the electrical resistivity spans 14 orders of magnitude. The dielectric constant of DLC ®lms covers the range of 2.5±6. The talk will review the optical and electrical characteristics of DLC and discuss the actual and potential applications based on these properties. q 1999 Elsevier Science S.A. All rights reserved.
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تاریخ انتشار 1999